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Hano turerekana imbibition-iterwa, yihitiyemo kandi itoranya ibintu byo guhanagura ibintu bya gallium ishingiye kumazi ya gliyumu yibyuma hejuru yicyuma hamwe na microscale topografiya.Gallium ishingiye ku byuma bisukuye ni ibikoresho bitangaje hamwe nuburinganire bukabije.Kubwibyo, biragoye kubikora muri firime zoroshye.Kurandura burundu eutectic alloy ya gallium na indium byagezweho hejuru yumuringa wa microstructures imbere yumwuka wumuyaga wa HCl, wakuyeho okiside karemano ivanze nicyuma cyamazi.Uku guhanagura gusobanurwa mubare hashingiwe ku cyitegererezo cya Wenzel hamwe na osmose, byerekana ko ingano ya microstructure ari ingenzi cyane kugirango osose iterwa na osose iterwa n'amazi meza.Mubyongeyeho, twerekana ko guhanagura kwizana kwibyuma byamazi bishobora guhita byerekanwa mukarere ka microstructures hejuru yicyuma kugirango habeho ishusho.Ubu buryo bworoshye buringaniza amakoti kandi agashushanya ibyuma byamazi hejuru yinini idafite imbaraga zo hanze cyangwa gukora ibintu bigoye.Twerekanye ko ibyuma byamazi byashushanyije bigumana imiyoboro yamashanyarazi niyo irambuye na nyuma yizunguruka inshuro nyinshi.
Gallium ishingiye ku byuma bisukuye (GaLM) byakuruye abantu benshi kubera imiterere yabo ishimishije nko gushonga gake, amashanyarazi menshi, ubukonje buke no gutemba, uburozi buke hamwe nubumuga buke1,2.Gallium isukuye ifite aho ishonga igera kuri 30 ° C, kandi iyo ihujwe mubikoresho bya eutectic hamwe nibyuma bimwe na bimwe nka In na Sn, aho gushonga biri munsi yubushyuhe bwicyumba.Ibintu bibiri by'ingenzi bya GaLM ni gallium indium eutectic alloy (EGaIn, 75% Ga na 25% Muburemere, aho gushonga: 15.5 ° C) na gallium indium tin eutectic alloy (GaInSn cyangwa galinstan, 68.5% Ga, 21.5% Muri, na 10 % amabati, ingingo yo gushonga: ~ 11 ° C) 1.2.Kubera amashanyarazi yabo mugice cyamazi, GaLMs zirimo gukorwaho iperereza cyane nkinzira ya elegitoronike ihindagurika cyangwa ihindagurika kubisabwa bitandukanye, harimo ibyuma bya elegitoronike 3,4,5,6,7,8,9 ibyuma byoroheje cyangwa bigoramye 10, 11, 12 .GaLM ifite uburemere buke hejuru (624 mNm-1 kuri EGaIn 18,19 na 534 mNm-1 kuri Galinstan20,21) bishobora kubagora kubyitwaramo cyangwa kubikoresha.Gukora igikonjo gikomeye cya okiside ya gallium kavukire hejuru ya GaLM mubihe bidukikije itanga igikonoshwa gihagarika GaLM muburyo butari bumwe.Uyu mutungo utuma GaLM icapwa, igashyirwa muri mikorobe, kandi igashushanywa n’imiterere ihamye yagezweho na oxyde 19,22,23,24,25,26,27.Igikonoshwa gikomeye cya okiside kandi cyemerera GaLM kwizirika hejuru yubuso bworoshye, ariko ikabuza ibyuma byijimye cyane gutembera mubuntu.Kwamamaza GaLM hejuru yubutaka bisaba imbaraga zo kumena igikonoshwa 28,29.
Ibishishwa bya Oxide birashobora gukurwaho, kurugero, acide ikomeye cyangwa shingiro.Mugihe habuze okiside, GaLM ikora ibitonyanga hejuru yimiterere hafi ya yose bitewe nubunini bwayo bunini, ariko haribisanzwe: GaLM ihanagura ibyuma byubutaka.Ga ikora ibyuma bihuza nibindi byuma binyuze mubikorwa bizwi nka "reaction reaction" 30,31,32.Uku guhindagurika kwinshi gusuzumwa mugihe habuze okiside yo hejuru kugirango byoroherezwe guhuza ibyuma.Nubwo, hamwe na okiside kavukire muri GaLM, byavuzwe ko guhuza ibyuma-byuma bikora iyo okiside ivunitse muguhuza ibyuma byoroshye29.Amazi meza atera ibisubizo muburyo bwo guhuza no guhanagura neza ibyuma byinshi 33,34,35.
Kugeza magingo aya, ubushakashatsi bwinshi bwakozwe ku mikoreshereze yimiterere myiza yo guhanagura GaLM hamwe nicyuma kugirango habeho icyitegererezo cya GaLM.Kurugero, GaLM yakoreshejwe muburyo bukomeye bwicyuma mukoresheje gusiga, kuzunguruka, gutera, cyangwa guhisha igicucu 34, 35, 36, 37, 38. Guhitamo guhitamo GaLM kumyuma ikomeye bituma GaLM ikora ishusho ihamye kandi isobanuwe neza.Nyamara, hejuru yuburebure bwa GaLM bidindiza ishyirwaho rya firime yoroheje cyane ndetse no kumurongo wibyuma.Kugira ngo iki kibazo gikemuke, Lacour n'abandi.yatangaje uburyo bwo gukora firime yoroheje, yoroheje ya GaLM yoroheje ahantu hanini muguhindura gallium yera kuri microstructures yubatswe na zahabu 37,39.Ubu buryo busaba kubika vacuum, bitinda cyane.Mubyongeyeho, muri rusange GaLM ntabwo yemerewe kubikoresho nkibi bitewe na embrittlement40.Imyuka nayo ishyira ibikoresho kuri substrate, bityo rero harasabwa icyitegererezo cyo gukora igishushanyo.Turimo gushakisha uburyo bwo gukora firime nziza ya GaLM nuburyo bwo gushushanya ibyuma byerekana imiterere ya topografiya GaLM itose ubwayo kandi igahitamo mugihe habuze okiside karemano.Hano turatanga raporo yihitiyemo itose ya oxyde ya EGaIn (isanzwe ya GaLM) dukoresheje imyitwarire idasanzwe yo guhanagura kumafoto yububiko bwa fotolitografiya.Dushiraho imiterere yubusobanuro bwa fotolitografiya kurwego rwa micro kugirango twige imbibition, bityo tugenzure itose ryamazi adafite okiside.Kunoza imitunganyirize ya EGaIn hejuru yicyuma cya microstructures cyasobanuwe nisesengura ryumubare ukurikije icyitegererezo cya Wenzel hamwe nuburyo bwo gutera akabariro.Hanyuma, twerekana ahantu hanini ho gushira no gushushanya EGaIn binyuze mukwikuramo, guhita no gutoranya amazi kuri microstructures ibyuma byoherejwe hejuru.Tensile electrode hamwe nugupima ibipimo birimo EGaIn imiterere byerekanwe nkibishobora gukoreshwa.
Absorption ni transport ya capillary aho amazi yinjira hejuru yimiterere 41, byorohereza ikwirakwizwa ryamazi.Twakoze ubushakashatsi ku myitwarire ya EGaIn hejuru yicyuma cya microstructures cyashyizwe mumyuka ya HCl (Ishusho 1).Umuringa watoranijwe nkicyuma hejuru yubutaka. Ku buso buringaniye bw'umuringa, EGaIn yerekanye inguni ntoya ya <20 ° imbere y'umwuka wa HCl, bitewe no guhuha 31 (Ishusho yinyongera). Ku buso buringaniye bw'umuringa, EGaIn yerekanye inguni ntoya ya <20 ° imbere y'umwuka wa HCl, bitewe no guhuha 31 (Ishusho yinyongera). На плоских медных поверхностях EGaIn показал низкий краевой угол <20 ° в присутствии паров HCl из-за читингного смачивания31 (дополнительный рисунок 1). Ku buso buringaniye bw'umuringa, EGaIn yerekanye inguni yo hasi ya <20 ° ihari imbere yumuyaga wa HCl kubera guhuha 31 (Ishusho yinyongera).在 平坦 的 铜 表面 上 , 由于 反应 , G EGaIn 在 存在 HCl 蒸气 的 情况 下 显示 20 <20 ° 的 低 接触 角 31 (补充 图 1)。在 平坦 的 铜 表面 , 由于 反应 G G EGaIn 在 存在 HCl На плоских медных поверхностях EGaIn демонстрирует низкие краевые углы <20 ° в присутствии паров HCl из-за матитного смачивания (дополнительный рисунок 1). Kuruhande rwumuringa uringaniye, EGaIn irerekana <20 ° inguni zo guhuza imbere yumwuka wa HCl kubera guhindagurika neza (Ishusho yinyongera 1).Twapimye impande zegeranye za EGaMu muringa mwinshi no kuri firime z'umuringa zashyizwe kuri polydimethylsiloxane (PDMS).
Inkingi (D (diameter) = l (intera) = 25 µm, d (intera iri hagati yinkingi) = 50 µm, H (uburebure) = 25 µm) na piramide (ubugari = 25 µm, uburebure = 18 µm) microstructures kuri Cu / PDMS.b Impinduka zishingiye kumwanya mugihe cyo guhuza impande zombi (zidafite microstructures) hamwe nimirongo yinkingi na piramide zirimo PDMS isize umuringa.c, d Kwandika intera yerekana (c) kureba kuruhande no (d) kureba hejuru ya EGaMu guhanagura hejuru hamwe ninkingi imbere yumwuka wa HCl.
Kugirango hamenyekane ingaruka za topografiya kumazi, hateguwe insimburangingo ya PDMS ifite inkingi hamwe na piramide, kuriyo umuringa washyizwemo na titanium yometseho (Ishusho 1a).Hagaragajwe ko microstructures yubuso bwa PDMS substrate yashizwemo umuringa (Ishusho yinyongera).Ingengabihe yo guhuza inguni ya EGaMu shusho hamwe na planari y'umuringa usukuye PDMS (Cu / PDMS) irerekanwa mumashusho.1b.Inguni yo guhuza ya EGaMu muringa ushushanyije / PDMS iramanuka kuri 0 ° muri ~ 1 min.Amazi meza ya EGaMu microstructures arashobora gukoreshwa nuburinganire bwa Wenzel \ ({{{{\ rm {cos}}}}}} \, {\ theta} _ {{bikabije}} = r \, {{{{{ \ rm {cos}}}}}}, \ \) Ubuso bwubuso (= agace nyako / agace kagaragara) hamwe nu mpande zindege ku ndege \ ({\ theta} _ {0} \).Ibisubizo byo kuzamura amazi ya EGaMu bishushanyo mbonera birahuza neza na moderi ya Wenzel, kubera ko r agaciro kinyuma ninyuma ya piramide ari 1.78 na 1.73.Ibi bivuze kandi ko igitonyanga cya EGaIn giherereye hejuru yubushushanyo kizinjira mumashanyarazi yubutabazi bwihuse.Ni ngombwa kumenya ko firime zisa cyane zakozwe muri uru rubanza, bitandukanye na EGaIn ku buso butubatswe (Ishusho yinyongera).
Kuva ku mutini.1c, d. Igishushanyo 3).Ubushakashatsi bwibanze bwibibanza byahujwe nigihe cyigihe cyo guhanagura neza hamwe ninzibacyuho iva mubutumburuke ikajya hejuru.Ingano yubutaka nimwe mubintu byingenzi muguhitamo niba kwigira bibaho.Mugereranije ingufu zubuso mbere na nyuma ya imbibition duhereye kuri termodinamike, inguni ikomeye yo guhuza \ ({\ theta} _ {c} \) ya imbibition yavuye (reba Ikiganiro cyinyongera kubisobanuro birambuye).Ibisubizo \ ({\ theta} _ {c} \) bisobanurwa ngo \ ({{{({\ rm {cos)))))) \, {\ theta} _ {c} = (1 - {\ phi} _ {S}) / (r - {\ phi} _ {S}) \) aho \ ({\ phi} _ {s} \) byerekana agace kagabanijwe hejuru yinyandiko na \ (r \ ) byerekana ubuso bukabije. Imbibition irashobora kubaho mugihe \ ({\ theta} _ {c} \)> \ ({\ theta} _ {0} \), ni ukuvuga inguni yo guhuza hejuru. Imbibition irashobora kubaho mugihe \ ({\ theta} _ {c} \)> \ ({\ theta} _ {0} \), ni ukuvuga inguni yo guhuza hejuru. Впитывание может происходить, когда \ ({\ theta} _ {c} \)> \ ({\ theta} _ {0} \), т.е.Контактный угол на поверхности. Absorption irashobora kubaho mugihe \ ({\ theta} _ {c} \)> \ ({\ theta} _ {0} \), ni ukuvuga impande zifatika hejuru.当 \ ({\ theta} _ {c} \)> \ ({\ theta} _ {0} \) , 即 平面 上 的 接触 角 时 , 会 发生 吸 吸。当 \ ({\ theta} _ {c} \)> \ ({\ theta} _ {0} \) , 即 平面 上 的 接触 角 时 , 会 发生 吸 吸。 Всاسىвание происходит, когда \ ({\ theta} _ {c} \)> \ ({\ theta} _ {0} \), конни угол на плоскости. Guswera bibaho iyo \ ({\ theta} _ {c} \)> \ ({\ theta} _ {0} \), guhuza impande zindege.Ku buso bwashushanyijeho, \ (r \) na \ ({\ phi} _ {s} \) bibarwa nka \ (1 + \ {(2 \ pi {RH}) / {d} ^ {2} \ }) d \) ni intera iri hagati yikigo cyinkingi ebyiri (Ishusho 1a).Kubuso bwubatswe nyuma yimitini.1a, inguni \ ({\ theta} _ {c} \) ni 60 °, ikaba nini kuruta indege ya \ ({\ theta} _ {0} \) (~ 25 °) muri HCl vapor Oxide idafite EGaIn kuri Cu / PDMS.Kubwibyo, EGaMu bitonyanga birashobora kwibasirwa byoroshye hejuru yumuringa wubatswe mubishushanyo 1a kubera kwinjizwa.
Kugira ngo dukore iperereza ku ngaruka zubunini bwa topografiya yubushakashatsi ku guhanagura no kwinjiza EGaIn, twahinduye ubunini bwinkingi zometseho umuringa.Ku mutini.2 yerekana impande zo guhuza no kwinjiza EGaIn kuri izi substrate.Intera l hagati yinkingi ingana na diameter yinkingi D kandi iri hagati ya 25 na 200 μ m.Uburebure bwa 25 µm burigihe kumurongo wose.\.Kubunini bwose bwageragejwe, \ ({\ theta} _ {c} \) irarenze \ ({\ theta} _ {0} \) kandi biteganijwe ko gukinisha.Nyamara, kwinjiza ntibikunze kugaragara kubishusho byashizweho nyuma ya l na D 200 µm (Ishusho 2e).
ingengabihe yo guhuza inguni ya EGaMu buso bwa Cu / PDMS hamwe ninkingi zubunini butandukanye nyuma yo guhura numwuka wa HCl.b - e Hejuru no kuruhande rwa EGaMu guswera.b D = l = 25 µm, r = 1.78.muri D = l = 50 μ m, r = 1.39.dD = l = 100 µm, r = 1.20.eD = l = 200 µm, r = 1.10.Inyandiko zose zifite uburebure bwa 25 µm.Aya mashusho yafashwe byibuze nyuma yiminota 15 nyuma yo guhura numwuka wa HCl.Ibitonyanga kuri EGaIn ni amazi aturuka kumyitwarire hagati ya oxyde ya gallium na HCl.Ibipimo byose bipima muri (b - e) ni mm 2.
Ikindi kigenderwaho kugirango hamenyekane amahirwe yo kwinjiza amazi ni ugukosora amazi hejuru nyuma yicyitegererezo.Kurbin n'abandi.Byaravuzwe ko iyo (1) imyanya iri hejuru bihagije, ibitonyanga bizakirwa nubuso bwashushanyije;(2) intera iri hagati yinkingi ni nto;na (3) guhuza impande zamazi hejuru ni nto bihagije42.Umubare \ ({\ theta} _ {0} \) y'amazi yo mu ndege arimo ibintu bimwe na bimwe bya substrate agomba kuba munsi yimpande zikomeye zo guhuza, \ ({\ theta} _ {c, {pin))} ) sqrt {2} -1) l \ big \}) \) (reba ikiganiro cyinyongera kubirambuye).Agaciro ka \ ({\ theta} _ {c, {pin}} \) biterwa nubunini bwa pin (Imbonerahamwe 1).Menya ibipimo bitagira urugero L = l / H kugirango umenye niba kwinjiza bibaho.Kugirango winjire, L igomba kuba munsi yurwego ntarengwa, \ ({L} _ {c} \) = 1 / \ (\ big \ {\ binini (\ sqrt {2} -1 \ binini) {{\ tan} } {\ theta} _ {{0}} \ nini \} \).Kuri EGaIn \ (({\ theta} _ {0} = {25} ^ {\ umuzenguruko}) \) kuri substrate y'umuringa \ ({L} _ {c} \) ni 5.2.Kubera ko L inkingi ya 200 μ m ari 8, iruta agaciro ka \ ({L} _ {c} \), kwinjiza EGaIn ntibibaho.Kugirango turusheho kugerageza ingaruka za geometrie, twarebye ubwacu-priming ya H na l zitandukanye (Ishusho yinyongera 5 nimbonerahamwe 1).Ibisubizo biremeranya neza nimibare yacu.Rero, L ihinduka nkuburyo bwiza bwo guhanura;ibyuma byamazi bihagarika gukurura bitewe no gukubita iyo intera iri hagati yinkingi ari nini ugereranije nuburebure bwinkingi.
Ubushuhe burashobora kugenwa ukurikije ibice byubuso bwa substrate.Twakoze ubushakashatsi ku ngaruka ziterwa hejuru yubushuhe no kwinjiza EGaIn dufatanya kubitsa Si na Cu ku nkingi nindege (Ishusho yinyongera 6).Inguni ya EGaInkuru igabanuka kuva kuri ~ 160 ° kugeza ~ 80 ° mugihe ubuso bwa binary Si / Cu bwiyongera kuva kuri 0 kugeza kuri 75% kubintu bikozwe mu muringa.Ku buso bwa 75% Cu / 25% Si, \ ({\ theta} _ {0} \) ni ~ 80 °, bihuye na \ ({L} _ {c} \) bingana na 0.43 ukurikije ibisobanuro byavuzwe haruguru .Kuberako inkingi l = H = 25 μm hamwe na L ingana na 1 iruta urwego \ ({L} _ {c} \), hejuru ya 75% Cu / 25% Si nyuma yo gushushanya ntabwo yakira kubera ubudahangarwa.Kubera ko imfuruka ya EGaIn yiyongera hiyongereyeho Si, hejuru ya H cyangwa hepfo l irasabwa gutsinda pinning no gutera akabariro.Kubwibyo, kubera ko impande zifatika (urugero \ ({\ theta} _ {0} \)) biterwa nimiterere yimiti yubuso, irashobora kandi kumenya niba imbibition ibaho muri microstructure.
EGaMu kwinjiza kumuringa ushushanyije / PDMS irashobora guhanagura ibyuma byamazi muburyo bwingirakamaro.Kugirango dusuzume umubare ntarengwa wumurongo winkingi utera imbibition, imitungo yo guhanagura ya EGaIn yagaragaye kuri Cu / PDMS hamwe nimirongo yinyuma yerekana imirongo itandukanye yumurongo kuva kuri 1 kugeza kuri 101 (Ishusho 3).Gutose biboneka cyane mukarere ka nyuma.Gukubita kwa EGaIn byagaragaye neza kandi uburebure bwikurikiranya bwiyongereye numubare wumurongo winkingi.Absorption hafi ya yose ibaho mugihe hari inyandiko zifite imirongo ibiri cyangwa munsi.Ibi birashobora guterwa no kwiyongera kwa capillary.Kugirango kwinjiza bibe muburyo bwinkingi, umuvuduko wa capillary uterwa no kugabanuka kwumutwe wa EGaIn bigomba kuneshwa (Ishusho yinyongera 7).Dufashe radiyo yo kugabanuka ya 12.5 µm kumurongo umwe EGaMu mutwe hamwe ninkingi yinkingi, umuvuduko wa capillary ni ~ 0,98 atm (~ 740 Torr).Umuvuduko mwinshi wa Laplace urashobora kwirinda gutose biterwa no kwinjiza EGaIn.Na none, imirongo mike yinkingi irashobora kugabanya imbaraga zo kwinjiza biterwa nigikorwa cya capillary hagati ya EGaIn ninkingi.
Ibitonyanga bya EGaIn kuri Cu / PDMS yubatswe ifite ishusho yubugari butandukanye (w) mukirere (mbere yo guhura numwuka wa HCl).Imirongo ya rake itangirira hejuru: 101 (w = 5025 µm), 51 (w = 2525 µm), 21 (w = 1025 µm), na 11 (w = 525 µm).b Guhindura icyerekezo cya EGaIn kuri (a) nyuma yo guhura numwuka wa HCl kuminota 10.c, d Gutose kwa EGaIn kuri Cu / PDMS hamwe nuburyo bwinkingi (c) imirongo ibiri (w = 75 µm) na (d) umurongo umwe (w = 25 µm).Aya mashusho yafashwe nyuma yiminota 10 nyuma yo guhura numwuka wa HCl.Ibipimo bipima kuri (a, b) na (c, d) ni mm 5 na 200 µm.Imyambi muri (c) yerekana kugabanuka k'umutwe wa EGaIn kubera kwinjizwa.
Kwinjira kwa EGaIn muburyo bwa Cu / PDMS butuma EGaIn ikorwa no guhitamo neza (Ishusho 4).Iyo igitonyanga cya EGaIn gishyizwe ahantu hateganijwe kandi kigahura numwuka wa HCl, igitonyanga cya EGaIn kibanza gusenyuka, kigakora inguni ntoya nkuko aside ikuraho umunzani.Ibikurikira, kwinjiza bitangirira kumpera yigitonyanga.Igishushanyo kinini-gishobora kugerwaho kuva kuri santimetero-nini ya EGaIn (Ishusho 4a, c).Kubera ko kwinjiza bibaho gusa hejuru yubutaka, EGaMuhanagura gusa agace kashushanyo kandi hafi yo guhagarika gutose iyo igeze hejuru.Kubera iyo mpamvu, imipaka ikarishye ya EGaIn igaragara (Ishusho 4d, e).Ku mutini.4b yerekana uburyo EGaIn yibasiye akarere katubatswe, cyane cyane hafi y’aho igitonyanga cya EGaIn cyashyizwe mbere.Ibi byatewe nuko diameter ntoya ya EGaIn ibitonyanga bikoreshwa muri ubu bushakashatsi byarenze ubugari bwinyuguti zishushanyije.Ibitonyanga bya EGaIn byashyizwe kumurongo wintangarugero no gutera intoki ukoresheje urushinge rwa 27-G na syringe, bikavamo ibitonyanga bifite ubunini buke bwa mm 1.Iki kibazo gishobora gukemurwa ukoresheje ibitonyanga bito bya EGaIn.Muri rusange, Igishushanyo cya 4 cyerekana ko guhanagura kwizana kwa EGaIn bishobora guterwa no kwerekanwa kuri microstructures.Ugereranije nakazi kashize, ubu buryo bwo guswera burihuta kandi nta mbaraga zo hanze zisabwa kugirango ugere neza (Imbonerahamwe 2).
ikirango cya kaminuza, inyuguti b, c muburyo bwumurabyo.Agace gakurura gatwikiriye umurongo winkingi hamwe na D = l = 25 µm.d, amashusho manini yimbavu muri e (c).Ibipimo bipima kuri (a - c) na (d, e) ni mm 5 na 500 µm.Kuri (c - e), ibitonyanga bito hejuru nyuma ya adsorption ihinduka amazi bitewe nigisubizo hagati ya oxyde ya gallium na HCl.Nta ngaruka zikomeye zatewe n’amazi ku mazi yagaragaye.Amazi akurwaho byoroshye binyuze muburyo bworoshye bwo kumisha.
Bitewe nuburyo bwamazi ya EGaIn, EGaIn yatwikiriye Cu / PDMS (EGaIn / Cu / PDMS) irashobora gukoreshwa kuri electrode yoroheje kandi irambuye.Igicapo 5a kigereranya impinduka zo guhangana na Cu / PDMS yumwimerere na EGaIn / Cu / PDMS munsi yimitwaro itandukanye.Kurwanya Cu / PDMS kuzamuka cyane mubibazo, mugihe kurwanya EGaIn / Cu / PDMS bikomeje kuba bike mubibazo.Ku mutini.5b na d berekana amashusho ya SEM hamwe namakuru ya EMF ajyanye na Cu / PDMS mbisi na EGaIn / Cu / PDMS mbere na nyuma yo gusaba voltage.Kuri Cu / PDMS idahwitse, deformasiyo irashobora gutera ibice muri firime ikomeye ya Cu yashyizwe kuri PDMS kubera kudahuza kwa elastique.Ibinyuranye, kuri EGaIn / Cu / PDMS, EGaIn iracyambika neza substrate ya Cu / PDMS kandi ikomeza umurongo w'amashanyarazi udafite ibice cyangwa ihinduka rikomeye na nyuma yo gukoreshwa.Amakuru ya EDS yemeje ko gallium na indium biva muri EGaIn byagabanijwe neza kuri substrate ya Cu / PDMS.Birashimishije ko ubunini bwa firime ya EGaIn ari bumwe kandi bugereranywa nuburebure bwinkingi. Ibi kandi bishimangirwa nubundi isesengura ry’imiterere, aho itandukaniro rigereranije riri hagati yubunini bwa firime ya EGaIn hamwe nuburebure bwimyanya ni <10% (Ishusho yinyongera 8 na Imbonerahamwe 3). Ibi kandi bishimangirwa nubundi isesengura ry’imiterere, aho itandukaniro rigereranije riri hagati yubunini bwa firime ya EGaIn hamwe nuburebure bwimyanya ni <10% (Ishusho yinyongera 8 na Imbonerahamwe 3). Это также подтверждается дальнейшим топографическим матом, где относительная разница между толщиной пленки EGaIn и висотой столба соверляет <10% (дополнительный рис. 8 и каа 3). Ibi kandi bishimangirwa nubundi isesengura ryimiterere yabantu, aho itandukaniro rigereranije hagati ya EGaMu mubyimba bya firime nuburebure bwinkingi ni <10% (Ishusho yinyongera 8 na Imbonerahamwe 3).进一步 的 形貌 分析 也 证实 这 G G G EGaIn 薄膜 厚度 与 柱子 高度 之间 的 相对 10 <10% (补充 图 8 和 表 3)。 <10% Это также было подтверждено дальнейшим топографическим матом, где относительная разница между толщиной пленки EGaIn и висотой столба соверляла <10% (дополнительный рис. 8 и каа 3). Ibi byashimangiwe kandi n’isesengura ry’imiterere y’imiterere, aho itandukaniro ugereranije hagati ya EGaMu mubyimba bya firime n'uburebure bwinkingi byari <10% (Ishusho yinyongera 8 nimbonerahamwe 3).Uku gusibanganya gushingiye kubutaka butuma uburebure bwa EGaIn bugenzurwa neza kandi bugakomeza guhagarara neza ahantu hanini, ubundi bikaba bitoroshye kubera imiterere yabyo.Igishushanyo cya 5c na e bigereranya ubworoherane no kurwanya ihindagurika rya Cu / PDMS na EGaIn / Cu / PDMS.Muri demo, LED yafunguye iyo ihujwe na Cu / PDMS cyangwa EGaIn / Cu / PDMS electrode.Iyo Cu / PDMS idahwitse irambuye, LED irazimya.Nyamara, electrode ya EGaIn / Cu / PDMS yagumye ihujwe n'amashanyarazi ndetse no munsi yumutwaro, kandi urumuri rwa LED rwacogoye gato kubera kwiyongera kwa electrode.
ihinduka risanzwe rihinduka hamwe no kongera umutwaro kuri Cu / PDMS na EGaIn / Cu / PDMS.b, d SEM amashusho nimbaraga zikwirakwiza X-ray spectroscopy (EDS) isesengura mbere (hejuru) na nyuma (hepfo) polydiplexes yuzuye (b) Cu / PDMS na (d) EGaIn / Cu / methylsiloxane.c, e LED zometse kuri (c) Cu / PDMS na (e) EGaIn / Cu / PDMS mbere (hejuru) na nyuma (hepfo) kurambura (~ 30% guhangayika).Igipimo cyibipimo muri (b) na (d) ni 50 µm.
Ku mutini.6a yerekana kurwanya EGaIn / Cu / PDMS nkigikorwa cyo kunanirwa kuva 0% kugeza 70%.Kwiyongera no kugarura imyigaragambyo bigereranywa no guhindura ibintu, ibyo bikaba bihuza neza n amategeko ya Pouillet kubikoresho bitavogerwa (R / R0 = (1 + ε) 2), aho R irwanya, R0 ni ukurwanya kwambere, ε ni 43. Ubundi bushakashatsi bwerekanye ko iyo urambuye, ibice bikomeye mu buryo bwamazi bishobora kongera kwisubiraho kandi bigakwirakwizwa neza hamwe no guhuza neza, bityo bikagabanya kwiyongera gukurura 43, 44. Muriyi mirimo, ariko, kiyobora ni> 99% ibyuma byamazi kubwinshi kuva firime ya Cu ifite 100 nm gusa. Muriyi mirimo, ariko, kiyobora ni> 99% ibyuma byamazi kubwinshi kuva firime ya Cu ifite 100 nm gusa. Однако в этой работе про проник состоит из> 99% жидкого металла по обему, так как пленки Cu имеют толщину всего 100 нм. Ariko, muriki gikorwa, kiyobora igizwe na> 99% ibyuma byamazi mubunini, kubera ko firime ya Cu ifite uburebure bwa nm 100 gusa.然而 , 在 这项 工作 中 , 由于 Cu 薄膜 只有 100 nm 厚 , 因此 导体 是> 99% 的 液态 金属 (按 体积 计)。然而 , 在 这项 工作 中 , 由于 Cu 薄膜 只有 100 nm 厚 , 因此 导体 是> 99%Ariko, muriki gikorwa, kubera ko firime ya Cu ifite uburebure bwa nm 100 gusa, umuyobozi uyobora ibyuma birenga 99% byamazi (kubijwi).Kubwibyo, ntabwo dutegereje Cu gutanga umusanzu wingenzi mumashanyarazi ya mashanyarazi.
impinduka isanzwe muri EGaIn / Cu / PDMS irwanya imbaraga zingana hagati ya 0-70%.Imihangayiko ntarengwa yageze mbere yo kunanirwa kwa PDMS yari 70% (Ishusho yinyongera 9).Utudomo dutukura nindangagaciro ziteganijwe n'amategeko ya Puet.b EGaIn / Cu / PDMS ikizamini gihamye mugihe cyo gusubiramo-kurambura.Imyitozo ya 30% yakoreshejwe mugupima cycle.Igipimo cyibipimo kuri inset ni cm 0,5.L nuburebure bwambere bwa EGaIn / Cu / PDMS mbere yo kurambura.
Ibipimo byo gupima (GF) byerekana ibyiyumvo bya sensor kandi bisobanurwa nkikigereranyo cyimpinduka mukurwanya impinduka mumurongo45.GF yiyongereye kuva kuri 1.7 kuri 10% igera kuri 2,6 kuri 70% kubera ihinduka rya geometrike yicyuma.Ugereranije nibindi bipimo bipima, GF EGaIn / Cu / PDMS agaciro karagereranijwe.Nka sensor, nubwo GF yayo idashobora kuba hejuru cyane, EGaIn / Cu / PDMS yerekana impinduka zikomeye zo guhangana n’ikimenyetso gike ku mutwaro w’urusaku.Kugirango hamenyekane ituze rya EGaIn / Cu / PDMS, imbaraga z'amashanyarazi zakurikiranwe mugihe cyizunguruka cyinshi kuri 30%.Nkuko bigaragara ku gishushanyo.6b, nyuma yinzira 4000 yo kurambura, agaciro kokurwanya kagumye muri 10%, bishobora guterwa no guhora kwishusho mugihe cyizunguruka inshuro 46.Niyo mpamvu, amashanyarazi maremare maremare ya EGaIn / Cu / PDMS nka electrode irambuye kandi kwizerwa kwikimenyetso nkigipimo cyoroshye byemejwe.
Muri iki kiganiro, turaganira ku miterere yatunganijwe ya GaLM hejuru yicyuma cya microstructures cyatewe no kwinjira.Kwiyuhagira kwuzuye kwa EGaIn byagezweho kumurongo winkingi na piramide hejuru yicyuma cya HCl.Ibi birashobora gusobanurwa mubare ukurikije moderi ya Wenzel hamwe nuburyo bwo guswera, byerekana ubunini bwa post-microstructure isabwa kugirango wike iterwa no guterwa.Kwiyuhagira ubwabyo no guhitamo EGaIn, iyobowe nicyuma cya microstructures hejuru yicyuma, bituma bishoboka gushira umwenda umwe ahantu hanini kandi ugakora ibyuma byamazi.EGaIn yubatswe Cu / PDMS substrates igumana imiyoboro y'amashanyarazi niyo irambuye na nyuma yo kuzunguruka inshuro nyinshi, nkuko byemejwe na SEM, EDS, hamwe n'ibipimo byo kurwanya amashanyarazi.Byongeye kandi, amashanyarazi ya Cu / PDMS yashizwemo na EGaIn ihinduka muburyo bwizewe kandi bwizewe ugereranije nubwoko bwakoreshejwe, byerekana ko ishobora gukoreshwa nkicyuma gikurura.Inyungu zishoboka zitangwa nihame ryamazi yo guhanagura yatewe na imbibition nizi zikurikira: (1) Gufata GaLM no gushushanya birashobora kugerwaho nta mbaraga zituruka hanze;(2) GaLM itose hejuru ya microstructure yubatswe n'umuringa ni thermodynamic.firime yavuyemo ya GaLM irahagaze nubwo ihindagurika;(3) guhindura uburebure bwinkingi zometseho umuringa birashobora gukora firime ya GaLM ifite ubugari bugenzurwa.Mubyongeyeho, ubu buryo bugabanya umubare wa GaLM ukenewe kugirango ukore film, kuko inkingi zifata igice cya firime.Kurugero, iyo hatangijwe umurongo winkingi zifite umurambararo wa 200 mkm (hamwe nintera iri hagati yinkingi za 25 mkm), ingano ya GaLM isabwa mugukora firime (~ 9 μm3 / μm2) igereranwa nubunini bwa firime nta inkingi.(25 µm3 / µm2).Ariko, muri uru rubanza, hagomba kuzirikanwa ko kurwanya inyigisho, byagereranijwe n’amategeko ya Puet, na byo byiyongera inshuro icyenda.Muri rusange, ibintu byihariye byo guhanagura ibyuma byamazi byavuzwe muri iyi ngingo bitanga uburyo bwiza bwo kubitsa ibyuma byamazi kumasoko atandukanye ya elegitoroniki arambuye hamwe nibindi bikorwa bigenda bigaragara.
PDMS substrate yateguwe mukuvanga matrike ya Sylgard 184 (Dow Corning, USA) hamwe nugukomera ku kigereranyo cya 10: 1 na 15: 1 kugirango bipimishe, bikurikirwa no gukira mu ziko kuri 60 ° C.Umuringa cyangwa silikoni washyizwe kuri wafer ya silicon (Silicon Wafer, Namkang High Technology Co., Ltd., Repubulika ya Koreya) hamwe na PDMS substrate hamwe na 10 nm yuburebure bwa titanium yifashishije sisitemu yihariye.Inkingi na piramide byashyizwe kumurongo wa PDMS ukoresheje silicon wafer ya fotolitografiya.Ubugari n'uburebure bwa piramide ni 25 na 18 µm.Uburebure bwikibari cyashizweho kuri 25 µm, 10 µm, na 1 µm, kandi diameter hamwe nikibanza cyacyo byari bitandukanye kuva 25 kugeza 200 µm.
Inguni yo guhuza EGaIn (gallium 75.5% / indium 24.5%,> 99,99%, Sigma Aldrich, Repubulika ya Koreya) yapimwe hifashishijwe isesengura rito (DSA100S, KRUSS, Ubudage). Inguni yo guhuza EGaIn (gallium 75.5% / indium 24.5%,> 99,99%, Sigma Aldrich, Repubulika ya Koreya) yapimwe hifashishijwe isesengura rito (DSA100S, KRUSS, Ubudage). Краевой угол EGaMu Inguni ya EGaIn (gallium 75.5% / indium 24.5%,> 99,99%, Sigma Aldrich, Repubulika ya Koreya) yapimwe hifashishijwe isesengura ry'ibitonyanga (DSA100S, KRUSS, Ubudage). EGaIn (镓 75.5% / 铟 24.5% ,> 99,99% , Sigma Aldrich , 大韩民国) 的 接触 角 滴 形 SA SA SA SA DSA100S , KRUSS , 德国) 测量。 EGaIn (gallium75.5% / indium24.5%,> 99,99%, Sigma Aldrich, 大韩民国) yapimwe hifashishijwe isesengura ryitumanaho (DSA100S, KRUSS, Ubudage). Краевой угол EGaMu Inguni ya EGaIn (gallium 75.5% / indium 24.5%,> 99,99%, Sigma Aldrich, Repubulika ya Koreya) yapimwe hifashishijwe isesengura ryerekana imiterere (DSA100S, KRUSS, Ubudage).Shira substrate muri cm 5 × 5 cm × cm 5 z'icyumba cy'ikirahure hanyuma ushire igitonyanga cya 4-5 μl cya EGaIn kuri substrate ukoresheje syringe ya mm 0,5.Kugirango habeho imyuka ya HCl, 20 μL yumuti wa HCl (37 wt.
Ubuso bwafashwe amashusho ukoresheje SEM (Tescan Vega 3, Koreya ya Tescan, Repubulika ya Koreya).EDS (Tescan Vega 3, Koreya ya Tescan, Repubulika ya Koreya) yakoreshejwe mu kwiga isesengura ryibanze no gukwirakwiza.Ubuso bwa EGaIn / Cu / PDMS bwasesenguwe hakoreshejwe profilometero optique (The Profilm3D, Filmetrics, USA).
Kugira ngo hakorwe iperereza ku ihinduka ry’imashanyarazi mu gihe cyo kurambura, ingero zifite na EGaIn zidafite ingufu zashyizwe ku bikoresho birambuye (Bending & Stretchable Machine System, SnM, Repubulika ya Koreya) kandi byahujwe n'amashanyarazi na metero 2400 ya Keithley. Kugira ngo hakorwe iperereza ku ihinduka ry’imashanyarazi mu gihe cyo kurambura, ingero zifite na EGaIn zidafite ingufu zashyizwe ku bikoresho birambuye (Bending & Stretchable Machine System, SnM, Repubulika ya Koreya) kandi byahujwe n'amashanyarazi na metero 2400 ya Keithley. Для исследования изменения Кттропро Манности во время Канов рат нения обцы с EGaIn и не не негогогогогогогого Kwiga ihinduka ryumuriro wamashanyarazi mugihe cyo kurambura, ingero hamwe na EGaIn zidafite ibikoresho byashyizwe hejuru (Bending & Stretchable Machine System, SnM, Repubulika ya Koreya) hanyuma bihuza amashanyarazi na metero 2400 ya Keithley.Kwiga ihinduka ryumuriro wamashanyarazi mugihe cyo kurambura, ingero hamwe na EGaIn zidafite kandi zashyizwe kumurongo urambuye (Bending and Stretching Machine Systems, SnM, Repubulika ya Koreya) hanyuma uhuza amashanyarazi na Keithley 2400 SourceMeter.Gupima impinduka mukurwanya murwego kuva 0% kugeza 70% byicyitegererezo.Kugirango igeragezwa rihamye, impinduka zo guhangana zapimwe hejuru ya 4000 30%.
Kubindi bisobanuro kubijyanye nigishushanyo mbonera cyo kwiga, reba ubushakashatsi bwibidukikije bujyanye niyi ngingo.
Amakuru ashyigikira ibisubizo byubu bushakashatsi atangwa mumakuru yinyongera hamwe namadosiye yamakuru.Iyi ngingo itanga amakuru yumwimerere.
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Igihe cyo kohereza: Ukuboza-13-2022